Pulsed Valve Cracker Effusion Cell (PEC)
The pulsed cracker effusion cell is a collaborative development between Nano4Energy and Gencoa, and is an innovative solution for single-stack sputtering, incorporating selenization/sulphurization.
The inclusion of a pulsed effusion cell to the process enables materials such as Selenium and Sulphur to be introduced during the sputtering of metals, allowing the controlled injection and dispersion of Se and S in application fields such as PV solar cells (CIGS processes).
By using the effusion cell in conjunction with Speedflo, a high degree of feedback control can be achieved through input from a sensor within the process.
- Precise control of gas
- Responsive and fast-active valve
- Dynamic feedback control using Speedflo
- Active reproducible feedback control
- Vapour phase injection and dispersion
Areas of application include CIGS, monomer vapours for barrier layer and organic vapours for OLED.