Effusion cells_old

Pulsed Valve Cracker Effusion Cell (PEC)

The pulsed cracker effusion cell is a collaborative development between Nano4Energy and Gencoa, and is an innovative solution for single-stack sputtering, incorporating selenization/sulphurization.

The inclusion of a pulsed effusion cell to the process enables materials such as Selenium and Sulphur to be introduced during the sputtering of metals, allowing the controlled injection and dispersion of Se and S in application fields such as PV solar cells (CIGS processes).

By using the effusion cell in conjunction with Speedflo, a high degree of feedback control can be achieved through input from a sensor within the process.

Key features of the effusion celleffusion cell

  • Precise control of gas
  • Responsive and fast-active valve
  • Dynamic feedback control using Speedflo
  • Active reproducible feedback control
  • Vapour phase injection and dispersion

Areas of application include CIGS, monomer vapours for barrier layer and organic vapours for OLED.