System solutions

Comprehensive Industrial PVD/PeCVD Machine Solutions

We specialize in providing end-to-end solutions for the design, implementation, commissioning, and recipe development of industrial PVD-HiPIMS and PeCVD machines.

Our expertise lies in developing optimized processes and methodologies that ensure the seamless integration of cutting-edge technology into your industrial operations.

 

This service includes:

  • Various system configurations: industrial batch coaters, lab benchtop units, and industrial inline systems.
  • Implementation of diverse glow discharge processes for etching, including pulsed, Arc (AEGD), or magnetron-enhanced (MEGD) methods, as well as metal ion etching using HiPIMS or MF dual electrodes.
  • Multiple magnetron operation modes: HiPIMS, UBM, dual magnetron, or RF.

Conceptual Design

Our team of experienced PhDs and designers specializes in creating innovative and customized solutions for the coating industry.

From initial concept to detailed schematics, we carefully design systems that meet your unique needs, ensuring optimal functionality and performance. We provide expert guidance throughout all stages of the process, including magnetron magnetic design, electrical wiring, hardware specifications, fixture selection, and PLC integration.

Industrial implementation

Our skilled and highly experienced team works diligently to ensure a smooth transition from design to real-world implementation, minimizing downtime and maximizing productivity.

Start-up & recipe implementation

We meticulously test and fine-tune each component and operation to ensure they perform as expected, while validating various process steps such as etching, heating, functional coating deposition, and reactive process stabilization.

The recipe implementation phase is where our commitment to excellence truly stands out. Coatings validated in our HiPIMS applications lab are precisely transferred to the novel industrial machine. The recipe structure is replicated in the new machine, and the properties of the deposited coatings are rigorously tested and validated

Other services